9

Focused ion beam applications to solid state devices

Year:
1996
Language:
english
File:
PDF, 843 KB
english, 1996
36

Resolution of 1:1 Electron Stepper with Patterned Cold Cathode

Year:
2002
Language:
english
File:
PDF, 1.60 MB
english, 2002
38

High-resolution focused ion beam lithography

Year:
1988
Language:
english
File:
PDF, 599 KB
english, 1988